Fraunhofer Institute for Surface Engineering and Thin Films ISTTuesday, January 21, 2024 |
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| 12:30 pm | Welcome & Introduction |
| 1:00 pm | Process Control in Sputtering Applications Marcus Frank Bühler Leybold Optics |
| 1:30 pm | Future Control Demands and Challenges Ralf Bandorf Fraunhofer IST |
| 2:00 pm | HIPIMS and Pulsed-DC Control Thomas Schütte PLASUS GmbH |
| 2:30 pm | Coffee Break & Product Show |
| 3:00 pm | Process Control in PECVD Applications Friederike von Fragstein Freudenberg |
| 3:30 pm | Combined Plasma & Layer Control Jan-Peter Urbach PLASUS GmbH |
| 4:00 pm | Coffee Break & Product Show |
| 4:30 pm | Machine Learning & AI in Production Adam Obrusnik PlasmaSolve |
| 5:00 pm | Challenges in generating data for ML & AI Holger Gerdes Fraunhofer IST |
| 7:00 pm | Dinner at Restaurant Fuchs Blau sponsored by PLASUS GmbH |
Wednesday, January 22, 2025 |
|
| 9:00 am | Introduction to experiments |
| 9:30 am | Experiments and Hands-On Station 1: Sputtering Station 2: PECVD Station 3: Process Control Equipment/ Individual Meetings |
| 12:30 pm | Wrap up & Lunch |
| 1:00 pm | End of Workshop |
Exterior view of the new machine hall of the Fraunhofer IST.
© Fraunhofer IST, Falko Oldenburg